Precision bearings, slewing rings and linear guides for semiconductor technology and cleanroom automation
Precision & Reliability
In semiconductor technology, precision, cleanroom compatibility, and process reliability are key factors in determining product quality and cost-effectiveness. Whether it’s wafer handling, lithography, inspection systems, or cleanroom automation—modern chip manufacturing equipment places the highest demands on every single component.
Franke supports OEMs and equipment manufacturers with innovative wire roller bearings, slewing rings, and linear guides that have been specifically developed for high-precision motion applications. Thanks to their compact design, low weight, and high integrability, they help make machines more powerful, efficient, and cost-effective.
Semiconductor Technology & Chip Manufacturing
The manufacture of modern semiconductors requires maximum process stability at the microscopic level. At the same time, demands for dynamic performance, automation, and cost-effectiveness are constantly increasing. Design engineers and equipment manufacturers therefore face the challenge of achieving highly precise movements reliably and reproducibly under complex environmental conditions.
- Cleanroom and Contamination Requirements
Even the smallest particles can compromise the quality of sensitive manufacturing processes. Components must therefore be suitable for cleanroom use, have low emissions, and help prevent contamination.
- Highest Precision and Repeatability
Precise positioning is critical in wafer-handling systems, inspection systems, and lithography systems. These systems require minimal runout deviations, the highest repeatability, and consistently stable motion sequences.
- Dynamic Movements and Short Cycle Times
Modern manufacturing systems must achieve high throughputs. This requires high speeds, rapid acceleration, and, at the same time, precise and controlled movements.
- Limited Installation Space
Die Integration zusätzlicher Funktionen in immer kompaktere Maschinenkonzepte stellt hohe Anforderungen an Konstruktion und Komponenten. Platzsparende Lösungen werden zu einem entscheidenden Wettbewerbsvorteil.
- Maximum reliability
Downtime in chip manufacturing incurs high costs. Components must operate reliably over the long term, minimize maintenance requirements, and support maximum system availability.
- Cost-effectiveness over the entire life cycle
In addition to technical performance, weight reduction, simplified designs, and a low total cost of ownership are becoming increasingly important.
Our Solutions for the Semiconductor Industry
Franke Wire Roller Bearings for High-Precision Motion Applications
Franke wire roller bearings combine low weight with high load-carrying capacity and exceptional design flexibility. Thanks to the proven Franke principle, the raceways are designed independently of the housing, enabling custom geometries and customer-specific integrations.
Your Benefits
High precision in rotary motion
Reduced moving masses
Optimized dynamics and energy efficiency
Compact machine designs
Customized solutions for cleanroom and semiconductor applications
Franke Linear Guides for Dynamic Positioning Applications
Franke linear guides enable precise linear motion while delivering high dynamic performance and a long service life. They are suitable for numerous applications in semiconductor technology and cleanroom automation.
Your Benefits
Precise positioning of wafers and assemblies
High accelerations
Short cycle times
Customized designs
Adaptation to specific environmental conditions
Franke Slewing Rings for Large Diameters with High Precision
In inspection systems, wafer-handling equipment, and robotic solutions, Franke rotary joints enable high-precision rotational movements even with large diameters.
Your Benefits
- High concentricity
- Generous center clearance for cable, media, and process routing
- Lightweight despite large sizes
- Integration of complex assemblies
- Optimal conditions for modern plant architectures
Design Freedom for Innovative Machine Concepts
DThrough aluminum solutions, custom geometries, and extensive integration options, Franke helps designers bring innovative machine concepts to life.
Benefits for Developers and Design Engineers
Function integration instead of additional assemblies
Reduction in the number of components
Simplified designs
Higher energy efficiency
Custom designs for demanding applications
Our Advantages for the Semiconductor Industry
- Particularly suitable for demanding applications in semiconductor technology
- High precision and repeatability
- Cleanroom-compatible solutions
- Low weight with high load-carrying capacity
- Compact design for high-density systems
- High dynamic performance and short cycle times
- Customization to the specific application
- Great design flexibility thanks to wire roller bearing technology
- Integration of additional functions and assemblies
- Reduction in weight, space requirements, and energy consumption
- High reliability and availability
- Support in reducing the total cost of ownership
Application examples in semiconductor technology
